![]() ![]() Under these parameters, we expect hard, scratch-resistant films with good adhesion.Īnother key process note is to consider the fill volume in the e-beam application because we find that the melt level of a material in the crucible directly affects the success of the crucible liner. Post deposition bake out at 400☌ in air for four hours eliminates residual absorption. A partial pressure of O 2 at 1 X 10 -4 Torr is also recommended. We estimate a deposition rate of 2-5 angstroms per second when the evaporation temperature is at ~2,000☌. If possible, Ion Assisted Deposition (IAD) is preferred. Pressure should be monitored to ensure outgassing is at an acceptable level before increasing power. We recommend sweeping the e-beam at low power to uniformly fuse the surface of the pieces and to avoid hole drilling. We recommend using a FABMATE ® or tantalum crucible liner. Tantalum Pentoxide (Ta 2O 5) SpecificationsĮ-beam Evaporation of Tantalum Pentoxide (Ta 2O 5)Į-beam evaporation is preferred over thermal evaporation for depositing tantalum oxide films. It is evaporated under vacuum to form films for the fabrication of semiconductors, optoelectronic devices, and fuel cells. Tantalum oxide can also be found in the glass for camera lenses. It is mainly used to produce capacitors which can be found in auto electronics, cell phones, and tools. It is crystalline solid and white in appearance with a density of 8.2 g/cc, a melting point of 1,872☌, and a vapor pressure of 10 -4 Torr at 1,920☌. Tantalum oxide is an inorganic chemical compound with a chemical formula of Ta 2O 5. Tantalum Pentoxide (Ta 2O 5) General Information To speak to someone directly about current pricing, please Actual prices can vary and may be higher or lower, as determined by availability and market fluctuations. These approximate materials prices are published to provide budgetary guidelines. We sell these pellets and pieces by unit weight for evaporation use in deposition processes. Tantalum Pentoxide (Ta 2O 5) Tablets & Pieces Overview ![]()
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